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Kinematical x-ray diffraction in nonuniform crystalline films: Strain and damage distributions in ion-implanted garnets

Speriosu, V. S. (1981) Kinematical x-ray diffraction in nonuniform crystalline films: Strain and damage distributions in ion-implanted garnets. Journal of Applied Physics, 52 (10). pp. 6094-6103. ISSN 0021-8979. http://resolver.caltech.edu/CaltechAUTHORS:SPEjap81

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Abstract

A kinematical model for general Bragg case x-ray diffraction in nonuniform films is presented. The model incorporates depth-dependent strain and spherically symmetric Gaussian distribution of randomly displaced atoms. The model is applicable to ion-implanted, diffused, and other single crystals. Layer thickness is arbitrary, provided maximum reflecting power is less than ~6%. Strain and random displacement (damage) distributions in He+-implanted Gd, Tm, Ga:YIG, and Ne+-implanted Gd3Ga5O2 are obtained by fitting the model to experimental rocking curves. In the former crystal the layer thickness was 0.89 µm with strain varying between 0.09 and 0.91%. In the latter crystal a wide range of strain and damage was obtained using successively higher doses. In each case layer thickness was 1900 Å, with 2.49% strain corresponding to 0.40-Å standard deviation of random displacements. The strain distributions were strictly linear with dose. The same, closely linear relationship between damage and implantation-induced strain was determined for both crystals.


Item Type:Article
Additional Information:Copyright © 1981 American Institute of Physics. (Received 23 March 1981; accepted for publication 22 June 1981) Thanks are due to C.H. Wilts for his continued support and for a careful reading of the manuscript. The contribution of H.L. Glass in the form of helpful discussions is gratefully acknowledged. B.M. Paine is thanked for the ion implantation of the GGG samples. Technical assistance by L.A. Moudy is acknowledged.
Subject Keywords:GARNETS, FILMS, STRAINS, SPATIAL DISTRIBUTION, X−RAY DIFFRACTION, CRYSTALS, DAMAGE, ION IMPLANTATION, MATHEMATICAL MODELS, BRAGG REFLECTION, GAUSSIAN FUNCTION, MONOCRYSTALS, THICKNESS, HELIUM IONS, NEON IONS, COMPARATIVE EVALUATIONS, THICKNESS, RARE EARTHS
Record Number:CaltechAUTHORS:SPEjap81
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:SPEjap81
Alternative URL:http://dx.doi.org/10.1063/1.328549
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:10205
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:16 Apr 2008
Last Modified:26 Dec 2012 09:58

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