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Kinetics of TiSi2 formation by thin Ti films on Si

Hung, L. S. and Gyulai, J. and Mayer, J. W. and Lau, S. S. and Nicolet, M-A. (1983) Kinetics of TiSi2 formation by thin Ti films on Si. Journal of Applied Physics, 54 (9). pp. 5076-5080. ISSN 0021-8979. http://resolver.caltech.edu/CaltechAUTHORS:HUNjap83

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Abstract

Silicide formation with Ti deposited on single crystal Si and Ti deposited on amorphous Si layers sequentially without breaking the vacuum was investigated using backscattering spectrometry and glancing-angle x-ray diffraction. For Ti deposited on amorphous Si, TiSi2 was formed with a rate proportional to (time)^1/2 and an activation energy of 1.8±0.1 eV. For Ti deposited on single crystal Si, the reaction rate was slower and the silicide layer was nonuniform in thickness. We attribute the difference in behavior to the presences of interfacial impurities in the case where Ti was deposited on single crystal Si.


Item Type:Article
Additional Information:© 1983 American Institute of Physics. Received 28 March 1983; accepted 12 May 1983. We acknowledge B.Y. Tsaur for the initiation of the present experiments, R. Fernandez and R. Gorris for the technical assistance, and L. Rathbun for Auger measurements. The work was supported in part by the Office of Naval Research (L.R. Cooper) and by NSF through the National Research and Resource Facility for Submicron Structures.
Record Number:CaltechAUTHORS:HUNjap83
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:HUNjap83
Alternative URL:http://dx.doi.org/10.1063/1.332781
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:10220
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:18 Apr 2008
Last Modified:26 Dec 2012 09:58

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