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Theoretical investigation of the effect of strain on phase separation in epitaxial layers

Zur, A. and McGill, T. C. (1985) Theoretical investigation of the effect of strain on phase separation in epitaxial layers. Journal of Vacuum Science and Technology B, 3 (4). pp. 1055-1060. ISSN 1071-1023. http://resolver.caltech.edu/CaltechAUTHORS:ZURjvstb85

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Abstract

We have theoretically investigated the phenomenon of alloy clustering in epitaxial films and, in particular, the case of AlxGa1–xAs grown epitaxially on GaAs. We show in the general case that the elastic strain in the film, caused by the finite mismatch between the lattice parameters of the film and the substrate, may change the miscibility properties of the film. A miscibility gap could be opened in the material composing the film, even if there is no such gap in the bulk material. Conversely, the strain could stabilize a solid solution in the film in cases where there is a miscibility gap in the bulk material of which the film is composed. We estimate that these effects are too small to account for phase separation in the case of AlxGa1–xAs on GaAs, but could be important in other systems, such as In(As, Sb).


Item Type:Article
Additional Information:© 1985 American Vacuum Society. (Received 14 February 1985; accepted 18 April 1985) The authors acknowledge the support of the Office of Naval Research under Contract No. N00014-84-K-0501. Discussions with P. Petroff of Bell Laboratories and T.S. Kuan of IBM T.J. Watson Research Center were very helpful in clarifying the experimental situation. We would also like to acknowledge useful discussions with W.L. Johnson and A. Zunger.
Subject Keywords:EPITAXIAL LAYERS; STRAINS; MISCIBILITY; PHASE SEPARATION; GALLIUM ARSENIDES; ALUMINUM ARSENIDES; SOLID CLUSTERS; ALLOYS; LATTICE PARAMETERS
Record Number:CaltechAUTHORS:ZURjvstb85
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:ZURjvstb85
Alternative URL:http://dx.doi.org/10.1116/1.583095
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:10415
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:02 May 2008
Last Modified:26 Dec 2012 10:00

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