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Air-bridge microbolometer for far-infrared detection

Neikirk, Dean P. and Rutledge, David B. (1984) Air-bridge microbolometer for far-infrared detection. Applied Physics Letters, 44 (2). pp. 153-155. ISSN 0003-6951. http://resolver.caltech.edu/CaltechAUTHORS:NEIapl84

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Abstract

A new microbolometer for far-infrared detection has been fabricated that allows an increase in sensitivity of a factor of 4 over the best previously reported bolometer. By suspending the detector in the air above its substrate a reduction in the thermal conductance out of the device by a factor of 5 has been achieved. At a modulation frequency of 100 kHz this microbolometer has an electrical noise equivalent power of 2.8×10^−11 W(Hz)^−1/2. A thermal model is also presented that accurately fits the response of the detector.


Item Type:Article
Additional Information:© 1984 American Institute of Physics. Received 22 August 1983; accepted 24 October 1983. We would like to acknowledge the support of the Jet Propulsion Laboratory through Dr. M. Litvak, and the Department of Energy under contract DEAM03-765F-00010 Task 11A.
Record Number:CaltechAUTHORS:NEIapl84
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:NEIapl84
Alternative URL:http://dx.doi.org/10.1063/1.94718
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:10583
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:21 May 2008
Last Modified:26 Dec 2012 10:02

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