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Electrical characteristics of Al contact to NiSi using thin W layer as a barrier

Bartur, M. and Nicolet, M-A. (1981) Electrical characteristics of Al contact to NiSi using thin W layer as a barrier. Applied Physics Letters, 39 (10). pp. 822-824. ISSN 0003-6951. http://resolver.caltech.edu/CaltechAUTHORS:BARapl81

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Abstract

We show that the thermal instability that is observed in Schottky diodes with an Al film on NiSi contact to <Si> can be removed by introducing a very thin (~250 Å) tungsten film between the Al and the NiSi layers. This structure can be formed by sequential evaporation of Ni, W, and Al and subsequent thermal annealing to form NiSi. Schottky barrier measurements show that the contact is thermally stable at 450 °C up to about 1-h annealing with very little change in the electronic barrier height. A model, derived from the electrical measurements, is proposed for the failure mode of the tungsten barrier after excessive annealing.


Item Type:Article
Additional Information:Copyright © 1981 American Institute of Physics. (Received 20 July 1981 accepted for publication 4 September 1981) The authors wish to thank R. Gorris and R. Fernandez for technical assistance. The work was financially in part by the U.S. Department of Energy and monitored by Sandia Laboratories, Albuquerque, New Mexico (H.T. Weaver and and M.B. Chamberlain), and by Solid State Devices, Inc. (A. Applebaum, President).
Subject Keywords:ELECTRIC CONTACTS, ELECTRICAL PROPERTIES, ALUMINUM, NICKEL SILICIDES, TUNGSTEN, LAYERS, TEMPERATURE EFFECTS, INSTABILITY, SCHOTTKY BARRIER DIODES, FILMS, EVAPORATION, ANNEALING, EXPERIMENTAL DATA, HIGH TEMPERATURE, POTENTIALS, MATHEMATICAL MODELS, FAILURES
Record Number:CaltechAUTHORS:BARapl81
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:BARapl81
Alternative URL:http://dx.doi.org/10.1063/1.92571
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:10606
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:21 May 2008
Last Modified:26 Dec 2012 10:03

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