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Statistical analysis of integrated passive delay lines

Analui, Behnam and Hajimiri, Ali (2003) Statistical analysis of integrated passive delay lines. In: IEEE Custom Integrated Circuits Conference (CICC 2003). IEEE , Piscataway, NJ, pp. 107-110. ISBN 0780378423 http://resolver.caltech.edu/CaltechAUTHORS:ANAcicc03

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Abstract

Statistical properties of integrated passive LC delay lines are investigated. A new variation using spiral inductors and vertical parallel plate (VPP) capacitors is introduced whose delay is primarily determined by the lateral dimensions, resulting in very accurate and repeatable delays. An MIM-based version of this line is also fabricated for comparison. Additionally, LC delay-based oscillators are implemented to compare the variations in active and passive delay elements. Experimental data is obtained from measurement of 27 and 47 sites on two wafers from two different process runs, respectively. The measurements show 0.6% delay variations for VPP-based delay line compared to 1.0% for its MIM-based counterpart.


Item Type:Book Section
Additional Information:© Copyright 2003 IEEE. Reprinted with permission. Publication Date: 21-24 Sept. 2003. The authors acknowledge M. Owrang for assistance in measurement and valuable feedbacks. They are also grateful to A. Komijani, S. Mandegaran, and I. Buck-Walter from Caltecb’s CHIC group for useful discussions and helps. They thank Lee Center for Advanced Networking, IBM, and Agilent Technologies for supporting this project.
Subject Keywords:MIM devices; capacitors; inductors; oscillators; passive networks; statistical analysis; LC delay lines; MIM-based delay lines; VPP capacitors; delay variations; delay-based oscillators; integrated passive delay lines; spiral inductors; statistical analysis; vertical parallel plate capacitors
Record Number:CaltechAUTHORS:ANAcicc03
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:ANAcicc03
Alternative URL:http://dx.doi.org/10.1109/CICC.2003.1249370
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:10829
Collection:CaltechAUTHORS
Deposited By: Kristin Buxton
Deposited On:14 Jun 2008
Last Modified:26 Dec 2012 10:05

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