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Analyses of metalorganic chemical-vapor-deposition-grown AlxGa1−xAs/GaAs strained superlattice structures by backscattering spectrometry and x-ray rocking curves

Hamdi, A. H. and Speriosu, V. S. and Nicolet, M-A. and Tandon, J. L. and Yeh, Y. C. M. (1985) Analyses of metalorganic chemical-vapor-deposition-grown AlxGa1−xAs/GaAs strained superlattice structures by backscattering spectrometry and x-ray rocking curves. Journal of Applied Physics, 57 (4). pp. 1400-1402. ISSN 0021-8979. http://resolver.caltech.edu/CaltechAUTHORS:HAMjap85

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Abstract

Backscattering spectrometry with channeling and x-ray rocking curves have been employed to analyze metalorganic chemical-vapor-deposition-grown AlxGa1−xAs/GaAs strained superlattice structures in significant detail. Both techniques complement each other in the precise determination of composition, thickness, and strain in the individual layers of the superlattices. In addition, the sensitivity of the two techniques allows quantitative measurements of transition regions at the interfaces of various layers. Such fine probing into thin layered superlattice structures provides essential feedback in controlling their growth.


Item Type:Article
Additional Information:Copyright © 1985 American Institute of Physics. Received 1 June 1984; accepted 10 September 1984. We would like to thank D.A. Smith, A. Mehta, and J. Wendt at Applied Solar Energy Corporation for their assistance in the preparation of samples. A.H. Hahmdi extends his thanks to IBM for a research fellowship.
Subject Keywords:X RADIATION, CHEMICAL COMPOSITION, CHEMICAL VAPOR DEPOSITION, VAPOR DEPOSITED COATINGS, INTERFACES, SUPERLATTICES, GALLIUM ARSENIDES, BACKSCATTERING, NONDESTRUCTIVE TESTING, THICKNESS, STRAINS, CRYSTAL STRUCTURE, ION CHANNELING, CRYSTAL GROWTH
Record Number:CaltechAUTHORS:HAMjap85
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:HAMjap85
Alternative URL:http://dx.doi.org/10.1063/1.334496
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:11015
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:23 Jun 2008
Last Modified:26 Dec 2012 10:07

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