Armani, A. M. and Vahala, K. J. (2007) Soft lithographic fabrication of microresonators. In: Digest of the IEEE LEOS Summer Topical Meetings. Portland, OR, 23-25 July 2007. IEEE , Piscataway, NJ, pp. 133-134. ISBN 1-4244-0926-8 http://resolver.caltech.edu/CaltechAUTHORS:ARMleos07
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Abstract
Using ultra-high-Q toroid microcavity masters, soft lithography is applied to fabricate polymer microcavity arrays with Q factors in excess of 10^6. This technique produces resonators with material-limited quality factors.
| Item Type: | Book Section | ||||||||
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| Additional Information: | © Copyright 2007 IEEE. Reprinted with permission. Publication Date: 23-25 July 2007. The authors would like to thank Stevens Martin at AOC for the Vicast polymer resin used in this work. This work was supported by DARPA and the Caltech Lee Center. A.M.A is supported by a Clare Boothe Luce postdoctoral fellowship. | ||||||||
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| Subject Keywords: | Q-factor; microcavities; micromechanical resonators; soft lithography; microresonators; polymer microcavity arrays; toroid microcavity masters | ||||||||
| Record Number: | CaltechAUTHORS:ARMleos07 | ||||||||
| Persistent URL: | http://resolver.caltech.edu/CaltechAUTHORS:ARMleos07 | ||||||||
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| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||||
| ID Code: | 11479 | ||||||||
| Collection: | CaltechAUTHORS | ||||||||
| Deposited By: | Kristin Buxton | ||||||||
| Deposited On: | 28 Aug 2008 03:20 | ||||||||
| Last Modified: | 26 Dec 2012 10:14 |
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