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Proton magnetic resonance spectra of plasma-deposited inorganic thin films

Reimer, J. A. and Vaughan, R. W. and Knights, J. C. and Lujan, R. A. (1981) Proton magnetic resonance spectra of plasma-deposited inorganic thin films. Journal of Vacuum Science and Technology, 19 (1). pp. 53-56. ISSN 0022-5355. http://resolver.caltech.edu/CaltechAUTHORS:REIjvst81

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Abstract

Proton magnetic resonance data are presented for the hydrogen alloys of plasma-deposited amorphous boron, carbon, silicon carbide, and silicon nitride. Linewidth and lineshape analysis leads to the conclusion that hydrogen nuclei are clustered in a-Si/C:H, a-C:H, and a-Si/C:H. Both a-Si/C:H and a-C:H data show that the hydrogen exists in two phases. Modeling of line- widths in a-Si/C:H indicates that the two phases are heavily hydrogenated carbon clusters imbedded in a weakly hydrogenated a-Si lattice. Finally, evidence is presented for the presence of motionally narrowed hydrogen spectra in a-Si/N:H, a-B:H, and a-C:H. It is suggested that the hydrogen nuclei giving rise to these spectra are associated with disorder modes.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1116/1.571016DOIUNSPECIFIED
Additional Information:© 1981 American Vacuum Society. Received 11 March 1981; accepted 20 March 1981. The authors thank S.I. Chan and T.M. Duncan for helpful comments on the manuscript and T.W. Sigmon for assistance with the Rutherford backscattering analysis. This work was supported by the National Science Foundation under Grant No. DMR 77-21394.
Funders:
Funding AgencyGrant Number
National Science FoundationDMR 77-21394
Subject Keywords:LINE WIDTHS, THIN FILMS, NUCLEAR MAGNETIC RESONANCE, HYDROGEN 1, NMR SPECTRA, HYDROGENATION, AMORPHOUS STATE, SILICON CARBIDES, SILICON NITRIDES, BORON, CARBON
Record Number:CaltechAUTHORS:REIjvst81
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:REIjvst81
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ID Code:12027
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Deposited On:20 Oct 2008 18:36
Last Modified:26 Dec 2012 10:25

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