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Surface micromachined membranes for tunnel transducers

Wong, Joyce and Scherer, Axel and George, Thomas (1997) Surface micromachined membranes for tunnel transducers. Journal of Vacuum Science and Technology B, 15 (6). pp. 2768-2772. ISSN 1071-1023. http://resolver.caltech.edu/CaltechAUTHORS:WONjvstb97

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Abstract

We have developed low-temperature surface micromachining procedures for the fabrication of suspended SiO2/Si3N4 membranes. This fabrication method was integrated with electron beam lithography, anisotropic ion etching, and electroplating to construct electrostatically deflectable tunnel transducers. We show the structures and some preliminary measurements on the performance of these monolithic devices.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1116/1.589724DOIUNSPECIFIED
Additional Information:© 1997 American Vacuum Society. Received 30 May 1997; accepted 31 July 1997. This work was funded by the National Science Foundation and the Army Research Office.
Funders:
Funding AgencyGrant Number
National Science FoundationUNSPECIFIED
Army Research OfficeUNSPECIFIED
Subject Keywords:transducers, tunnelling, micromachining, membranes, silicon compounds
Record Number:CaltechAUTHORS:WONjvstb97
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:WONjvstb97
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:12213
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:29 Oct 2008 06:10
Last Modified:26 Dec 2012 10:28

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