Temesvary, Viktoria and Wu, Shuyun and Hsieh, Wen H. and Tai, Yu-Chong and Miu, Denny K. (1995) Design, fabrication, and testing of silicon microgimbals for super-compact rigid disk drives. Journal of Microelectromechanical Systems, 4 (1). pp. 18-27. ISSN 1057-7157. http://resolver.caltech.edu/CaltechAUTHORS:TEMjms95
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This paper documents results related to design optimization, fabrication process refinement, and micron-level static/dynamic testing of silicon micromachined microgimbals that have applications in super-compact computer disk drives as well as many other engineering applications of microstructures and microactuators requiring significant out-of-plane motions. The objective of the optimization effort is to increase the in-plane to out-of-plane stiffness ratio in order to maximize compliance and servo bandwidth and to increase the displacement to strain ratio to maximize the shock resistance of the microgimbals, while that of the process modification effort is to simplify in order to reduce manufacturing cost. The testing effort is to characterize both the static and dynamic performance using precision instrumentation in order to compare various prototype designs.
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|Deposited On:||06 Jan 2006|
|Last Modified:||24 Apr 2015 16:23|
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