Goodwin, D. G. (1993) Scaling laws for diamond chemical-vapor deposition. II. Atomic hydrogen transport. Journal of Applied Physics, 74 (11). pp. 6895-6906. ISSN 0021-8979 http://resolver.caltech.edu/CaltechAUTHORS:GOOjap93b
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Abstract
Scaling relations are developed to allow estimation of the atomic hydrogen concentration at the substrate during diamond chemical-vapor deposition for both diffusion-dominated and convection-dominated reactors. In the convection-dominated case, it is shown that there exists an optimal Mach number which maximizes the H concentration delivered to the substrate. In addition, when homogeneous recombination is taken into account, there exists an optimal operating pressure. This analysis shows that a sonic flow of highly dissociated hydrogen at a pressure near atmospheric is optimal for rapid growth of high-quality diamond.
| Item Type: | Article |
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| Additional Information: | Copyright © 1993 American Institute of Physics (Received 14 June 1993; accepted 31 July 1993) Helpful discussions with C. Brennen, A. Acosta, R. Sabersky, N. Glumac, and S. Harris are greatly appreciated. This work is supported, in part, by the National Science Foundation, the Office of Naval Research, and the Naval Research Laboratory. |
| Subject Keywords: | DIAMONDS; THIN FILMS; CVD; SCALING LAWS; HYDROGEN; TRANSPORT PROCESSES; CONVECTION; MACH NUMBER; PRESSURE DEPENDENCE; FILM GROWTH |
| Record Number: | CaltechAUTHORS:GOOjap93b |
| Persistent URL: | http://resolver.caltech.edu/CaltechAUTHORS:GOOjap93b |
| Alternative URL: | http://dx.doi.org/10.1063/1.355064 |
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. |
| ID Code: | 1408 |
| Collection: | CaltechAUTHORS |
| Deposited By: | Archive Administrator |
| Deposited On: | 17 Jan 2006 |
| Last Modified: | 26 Dec 2012 08:44 |
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