Sun, Minwei and Maichen, Wolfgang and Pophale, Ramdas and Liu, Yan and Cai, Rui and Lew, Christopher M. and Hunt, Heather and Deem, Michael W. and Davis, Mark E. and Yan, Yushan (2009) Dielectric constant measurement of zeolite powders by time-domain reflectometry. Microporous and Mesoporous Materials, 123 (1-3). pp. 10-14. ISSN 1387-1811 http://resolver.caltech.edu/CaltechAUTHORS:20090904-125622074
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Low-dielectric-constant (low-k) insulator materials are desired for future integrated circuits (IC) to lower both the crosstalk between wires and power consumption. Previous work in our group has demonstrated that pure silica zeolites (PSZs) are the best candidates for ultra low-k materials. Although there are many different types of zeolite framework structures, only a few (e.g., MFI and MEL) have been investigated because measurement of the dielectric constant requires the preparation of a high quality thin film. The development of a simple measurement method for powdered zeolite samples is essential to accelerate the screening process for zeolites. In this paper, time-domain reflectometry (TDR) coupled with the use of a transmission line is introduced for the first time for measuring low-k powdered materials. The technique can quickly measure the dielectric constants of powdered samples over a large frequency range using less than 0.5 g of sample with high reliability and accuracy. Successful measurements on quartz and high-k materials (e.g., HfO_2) indicate that this method can be applied to powdered samples in general.
|Additional Information:||Copyright © 2009 Elsevier. Received 24 January 2009; accepted 10 March 2009. Available online 16 March 2009. This work is supported by the NSF (Grant CTS-0404376) and the DOE (Grant DE-FG02-03ER15456).|
|Subject Keywords:||Zeolite; Time-domain reflectometry; Dielectric constant; Powdered sample; Ultra low-k|
|Official Citation:||Minwei Sun, Wolfgang Maichen, Ramdas Pophale, Yan Liu, Rui Cai, Christopher M. Lew, Heather Hunt, Michael W. Deem, Mark E. Davis, Yushan Yan, Dielectric constant measurement of zeolite powders by time-domain reflectometry, Microporous and Mesoporous Materials, Volume 123, Issues 1-3, 1 July 2009, Pages 10-14, ISSN 1387-1811, DOI: 10.1016/j.micromeso.2009.03.013. (http://www.sciencedirect.com/science/article/B6TH4-4VVGKPN-3/2/93a80f67387dc0e00d3e9f25a21294d0)|
|Usage Policy:||No commercial reproduction, distribution, display or performance rights in this work are provided.|
|Deposited By:||George Porter|
|Deposited On:||23 Sep 2009 18:12|
|Last Modified:||26 Dec 2012 11:19|
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