Böhm, H. R. and Gigan, S. and Blaser, F. and Zeilinger, A. and Aspelmeyer, M. and Langer, G. and Bäuerle, D. and Hertzberg, J. B. and Schwab, K. C. (2006) High reflectivity high-Q micromechanical Bragg mirror. Applied Physics Letters, 89 (22). Art. No. 223101. ISSN 0003-6951 http://resolver.caltech.edu/CaltechAUTHORS:20090911-092251503
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Abstract
The authors report on the fabrication and characterization of a micromechanical oscillator consisting only of a freestanding dielectric Bragg mirror with high optical reflectivity and high mechanical quality. The fabrication technique is a hybrid approach involving laser ablation and dry etching. The mirror has a reflectivity of 99.6%, a mass of 400 ng, and a mechanical quality factor Q of approximately 10^4. Using this micromirror in a Fabry-Pérot cavity, a finesse of 500 has been achieved. This is an important step towards designing tunable high-Q high-finesse cavities on chip.
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| Additional Information: | ©2006 American Institute of Physics. Received 28 July 2006; accepted 13 October 2006; published 27 November 2006. The authors would like to thank Heidi Piglmayer-Brezina for fabricating the masks for the laser ablation. The authors acknowledge financial support by the Austrian Science Fund (FWF) under the programs SFB15 and P16133-N08, by the Austrian NANO Initiative (MNA), by the European Commission under the Integrated Project Qubit Applications (QAP) funded by the IST Directorate under Contract No. 015846, by grant RFP1-06-14 from The Foundational Questions Institute, and by the City of Vienna. | ||||||||||||||
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| Subject Keywords: | reflectivity; Q-factor; micromirrors; micromechanical devices; optical fabrication; dielectric devices; laser ablation; etching | ||||||||||||||
| Record Number: | CaltechAUTHORS:20090911-092251503 | ||||||||||||||
| Persistent URL: | http://resolver.caltech.edu/CaltechAUTHORS:20090911-092251503 | ||||||||||||||
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| Official Citation: | High reflectivity high-Q micromechanical Bragg mirror H. R. Bohm, S. Gigan, F. Blaser, A. Zeilinger, M. Aspelmeyer, G. Langer, D. Bauerle, J. B. Hertzberg, and K. C. Schwab, Appl. Phys. Lett. 89, 223101 (2006), DOI:10.1063/1.2393000 | ||||||||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||||||||||
| ID Code: | 15761 | ||||||||||||||
| Collection: | CaltechAUTHORS | ||||||||||||||
| Deposited By: | George Porter | ||||||||||||||
| Deposited On: | 14 Sep 2009 16:50 | ||||||||||||||
| Last Modified: | 26 Dec 2012 11:21 |
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