Karabalin, R. B. and Matheny, M. H. and Feng, X. L. and Defaÿ, E. and Le-Rhun, G. and Marcoux, C. and Hentz, S. and Andreucci, P. and Roukes, M. L. (2009) Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films. Applied Physics Letters, 95 (10). Art. No. 103111. ISSN 0003-6951 http://resolver.caltech.edu/CaltechAUTHORS:20091001-140129826
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Abstract
We demonstrate piezoelectrically actuated, electrically tunable nanomechanical resonators based on multilayers containing a 100-nm-thin aluminum nitride (AlN) layer. Efficient piezoelectric actuation of very high frequency fundamental flexural modes up to ~80 MHz is demonstrated at room temperature. Thermomechanical fluctuations of AlN cantilevers measured by optical interferometry enable calibration of the transduction responsivity and displacement sensitivities of the resonators. Measurements and analyses show that the 100 nm AlN layer employed has an excellent piezoelectric coefficient, d_(31)=2.4 pm/V. Doubly clamped AlN beams exhibit significant frequency tuning behavior with applied dc voltage.
| Item Type: | Article | ||||||
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| Additional Information: | © 2009 American Institute of Physics. Received: 22 June 2009; accepted: 23 July 2009; published online: 9 September 2009. We are grateful to G. Villanueva, J.L. Arlett, and J.E. Sader for helpful discussions and Y. Wu for illustration. We acknowledge financial support for this work from DARPA/ MTO and SPAWAR under the Grant No. N66001-07-1-2039. | ||||||
| Group: | Kavli Nanoscience Institute | ||||||
| Funders: |
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| Subject Keywords: | aluminium compounds, beams (structures), cantilevers, dielectric resonators, multilayers, nanoelectromechanical devices, piezoelectric actuators, piezoelectric thin films, piezoelectricity | ||||||
| Classification Code: | PACS:85.85.+j 85.50.-n 77.65.-i 77.55.+f 07.10.Cm | ||||||
| Record Number: | CaltechAUTHORS:20091001-140129826 | ||||||
| Persistent URL: | http://resolver.caltech.edu/CaltechAUTHORS:20091001-140129826 | ||||||
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| Official Citation: | Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films R. B. Karabalin, M. H. Matheny, X. L. Feng, E. Defay, G. Le Rhun, C. Marcoux, S. Hentz, P. Andreucci, and M. L. Roukes, Appl. Phys. Lett. 95, 103111 (2009), DOI:10.1063/1.3216586 | ||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||
| ID Code: | 16156 | ||||||
| Collection: | CaltechAUTHORS | ||||||
| Deposited By: | Ruth Sustaita | ||||||
| Deposited On: | 02 Oct 2009 17:23 | ||||||
| Last Modified: | 26 Dec 2012 11:26 |
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