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Microfabrication of silicon–nitride micromesh bolometric detectors for Planck high frequency instrument

Yun, Minhee and Bock, Jamie and Holmes, Warren and Koch, Tim and Mulder, Jerry and Vasquez, Richard P. and Wild, Larry and Lange, Andrew (2004) Microfabrication of silicon–nitride micromesh bolometric detectors for Planck high frequency instrument. Journal of Vacuum Science and Technology B, 22 (1). pp. 220-225. ISSN 1071-1023. http://resolver.caltech.edu/CaltechAUTHORS:YUNjvstb04

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Abstract

The high frequency instrument (HFI) on the National Aeronautics and Space Administration/European Space Agency Planck Surveyor, scheduled for launch in 2007, will map the entire sky in six frequency bands ranging from 100 to 857 GHz to probe cosmic microwave background anisotropy and polarization with angular resolution ranging from 9[prime] to 5[prime]. The HFI focal plane will contain 48 silicon–nitride micromesh bolometers operating from a 100 mK heat sink. Four detectors in each of the six bands will detect unpolarized radiation. An additional four pairs of detectors will provide sensitivity to linear polarization of emissions at 143, 217, and 353 GHz. We have fabricated and developed sensitive Si3N4 micromesh spider-web bolometers for submillimeter observation using microelectromechanical system techniques. The spiderweb architecture in this research provides high infrared absorption with minimal heat capacity and volume.


Item Type:Article
Additional Information:©2004 American Vacuum Society. (Received 11 November 2002; accepted 24 November 2003; published 23 January 2004) This research was performed at the Jet Propulsion Laboratory, an operating division of the California Institute of Technology, under a contract with the National Aeronautics and Space Administration. Presented at the AVS 49th International Symposium, 4–8 November 2002, Denver, CO.
Subject Keywords:bolometers; silicon compounds; radiofrequency cosmic radiation; electromagnetic wave polarisation; heat sinks; specific heat; light absorption; microsensors
Record Number:CaltechAUTHORS:YUNjvstb04
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:YUNjvstb04
Alternative URL:http://dx.doi.org/10.1116/1.1642644
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:1846
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:20 Feb 2006
Last Modified:26 Dec 2012 08:46

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