Parylene coated silicon probes for neural prosthesis

Abstract

Silicon neural prosthetic probes require reliable sensing electrodes able to access deep cortical structures without breakage. However, manufacturing limitations have prevented a strong and biocompatible silicon electrode array from reaching this goal. We here demonstrate the first high-density, parylene-coated silicon probe (1.2 cm long) with micro-fabricated electrodes that is able to be inserted in vivo without failure. This work also presents new experimental results for array shank deflection testing, lifetime soak testing as well as the in vitro electrical characterization of the gold and platinum micro-electrodes. These results allow us to optimize the geometry and treatment for both the silicon probe and the metal electrodes.