Huang, Ray and Pang, Changlin and Tai, Yu-Chong and Emken, Jeremy and Ustun, Cevat and Andersen, Richard (2008) Parylene coated silicon probes for neural prosthesis. In: 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Sanya, China 6-9 January 2008. IEEE , Piscataway, NJ, pp. 908-911. ISBN 978-1-4244-1907-4 http://resolver.caltech.edu/CaltechAUTHORS:20100708-085106376
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Silicon neural prosthetic probes require reliable sensing electrodes able to access deep cortical structures without breakage. However, manufacturing limitations have prevented a strong and biocompatible silicon electrode array from reaching this goal. We here demonstrate the first high-density, parylene-coated silicon probe (1.2 cm long) with micro-fabricated electrodes that is able to be inserted in vivo without failure. This work also presents new experimental results for array shank deflection testing, lifetime soak testing as well as the in vitro electrical characterization of the gold and platinum micro-electrodes. These results allow us to optimize the geometry and treatment for both the silicon probe and the metal electrodes.
|Item Type:||Book Section|
|Additional Information:||© 2008 IEEE. This project was funded by the Defense Advanced Research Projects Agency (DARPA) (Award # 908165) and by National Institute of Health (NIH) moveable probe project (Award # R01EY015545). The authors would also like to thank Mr. Trevor Roper, other members of the Caltech Micromachining Laboratory and Andersen lab at Caltech for their advice and help.|
|Subject Keywords:||parylene cable; neuralprosthesis; siliconprobe|
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|Usage Policy:||No commercial reproduction, distribution, display or performance rights in this work are provided.|
|Deposited By:||Tony Diaz|
|Deposited On:||09 Jul 2010 16:45|
|Last Modified:||26 Dec 2012 12:12|
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