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Differing results obtained in the doping of semiconductors by energetic ions

McCaldin, J. O. and Widmer, A. E. (1964) Differing results obtained in the doping of semiconductors by energetic ions. Journal of Applied Physics, 35 (6). pp. 1985-1986. ISSN 0021-8979. http://resolver.caltech.edu/CaltechAUTHORS:MCCjap64

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Abstract

Conflicting results have been reported on the doping of semiconductors by energetic ions. The purpose of this communication is to call attention to certain experimental parameters which are important in resolving these discrepancies.


Item Type:Article
Additional Information:Copyright © 1964 American Institute of Physics. Received 12 December 1963.
Record Number:CaltechAUTHORS:MCCjap64
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:MCCjap64
Alternative URL:http://dx.doi.org/10.1063/1.1713787
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:2090
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:07 Mar 2006
Last Modified:26 Dec 2012 08:47

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