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Macroporous silicon membranes as electron and x-ray transmissive windows

Schilling, J. and Scherer, A. and Gösele, U. and Kolbe, M. (2004) Macroporous silicon membranes as electron and x-ray transmissive windows. Applied Physics Letters, 85 (7). pp. 1152-1154. ISSN 0003-6951. http://resolver.caltech.edu/CaltechAUTHORS:SCHapl04

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Abstract

Macroporous silicon membranes are fabricated whose pores are terminated with 60 nm thin silicon dioxide shells. The transmission of electrons with energies of 5 kV-25 kV through these membranes was investigated reaching a maximum of 22% for 25 kV. Furthermore, the transmission of electromagnetic radiation ranging from the far-infrared to the x-ray region was determined. The results suggest the application of the membrane as window material for electron optics and energy dispersive x-ray detectors.


Item Type:Article
Additional Information:Copyright © 2004 American Institute of Physics. Received 9 February 2004; accepted 21 May 2004.
Subject Keywords:silicon; elemental semiconductors; membranes; porous semiconductors; electromagnetic wave transmission; electron optics; electron microscopes; X-ray detection
Record Number:CaltechAUTHORS:SCHapl04
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:SCHapl04
Alternative URL:http://dx.doi.org/10.1063/1.1772519
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:2104
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:08 Mar 2006
Last Modified:26 Dec 2012 08:47

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