Matthias, Sven and Müller, Frank and Gösele, Ulrich (2005) Controlled nonuniformity in macroporous silicon pore growth. Applied Physics Letters, 87 (22). Art. No. 224106. ISSN 0003-6951. http://resolver.caltech.edu/CaltechAUTHORS:MATapl05
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Photoelectrochemical etching of uniform prestructured silicon wafers in hydrofluoric acid containing solutions yields periodic structures that can be applied to two- and three-dimensional photonic crystals or microfluidics. Here we demonstrate experimentally macroporous silicon etching initiated by a nonuniform predefined lattice. For conveniently chosen parameters we observe a stable growth of pores whose geometrical appearance depends strongly on the spatially different nucleation conditions. Moreover, we show preliminary results on three-dimensionally shaped pores. This material can be used to realize hybrid photonic crystal structures and incorporate waveguides in three-dimensional photonic crystals.
|Additional Information:||Copyright © 2005 American Institute of Physics. Received 16 September 2005; accepted 12 October 2005; published online 23 November 2005. The authors thank B. Hasler (Infineon Technologies) for the supply of surface-structured silicon wafers. This project was partly financed by a research award for young scientists given by the government of Saxony-Anhalt in 2003 to one of the authors (S.M.).|
|Subject Keywords:||silicon; elemental semiconductors; porous materials; etching; nucleation|
|Usage Policy:||No commercial reproduction, distribution, display or performance rights in this work are provided.|
|Deposited By:||Tony Diaz|
|Deposited On:||09 Mar 2006|
|Last Modified:||26 Dec 2012 08:47|
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