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In situ reflection electron energy loss spectroscopy measurements of low temperature surface cleaning for Si molecular beam epitaxy

Nikzad, Shouleh and Wong, Selmer S. and Ahn, Channing C. and Smith, Aimee L. and Atwater, Harry A. (1993) In situ reflection electron energy loss spectroscopy measurements of low temperature surface cleaning for Si molecular beam epitaxy. Applied Physics Letters, 63 (10). pp. 1414-1416. ISSN 0003-6951. http://resolver.caltech.edu/CaltechAUTHORS:NIKapl93

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Abstract

In situ analysis of hydrocarbon desorption from hydrogen terminated Si(100) surfaces was performed in a silicon molecular beam epitaxy system, using reflection electron energy loss spectroscopy, in conjunction with conventional reflection high energy electron diffraction analysis. Measurements of C K edge core loss intensities demonstrate that this method is sufficiently sensitive to enable in situ analysis of hydrocarbon desorption at fractional monolayer coverages during low-temperature isothermal anneals. Hydrocarbon desorption was found to begin at 115 °C, and at 200 °C complete desorption occurred within 10 min. Hydrocarbon coverage was not measurably affected by operation of ionization gauge filaments during low temperature anneals, but was increased by transient outgassing of the sample holder, and its environs.


Item Type:Article
Additional Information:© 1993 American Institute of Physics (Received 28 September 1992; accepted 2 July 1993) This work was supported by grants from NSF (DMR-9202587) and the Caltech Consortium in Chemistry and Chemical Engineering. Use of x-ray photoelectron spectroscopy facilities of the Beckman Institute at Caltech and technical assistance of A. P. Rice is gratefully acknowledged.
Subject Keywords:SILICON; SURFACE CLEANING; HEAT TREATMENTS; DESORPTION; HYDROCARBONS; EEL SPECTROSCOPY; REFLECTION; IN–SITU PROCESSING; MOLECULAR BEAM EPITAXY; MEASURING METHODS
Record Number:CaltechAUTHORS:NIKapl93
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:NIKapl93
Alternative URL:http://dx.doi.org/10.1063/1.109694
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:2489
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:05 Apr 2006
Last Modified:26 Dec 2012 08:49

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