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Ultrasensitive nanoelectromechanical mass detection

Ekinci, K. L. and Huang, X. M. L. and Roukes, M. L. (2004) Ultrasensitive nanoelectromechanical mass detection. Applied Physics Letters, 84 (22). pp. 4469-4471. ISSN 0003-6951. http://resolver.caltech.edu/CaltechAUTHORS:EKIapl04

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Abstract

We describe the application of nanoelectromechanical systems (NEMS) to ultrasensitive mass detection. In these experiments, a modulated flux of atoms was adsorbed upon the surface of a 32.8 MHz NEMS resonator within an ultrahigh-vacuum environment. The mass-induced resonance frequency shifts by these adsorbates were then measured to ascertain a mass sensitivity of 2.53×10^–18 g. In these initial measurements, this sensitivity is limited by the noise in the NEMS displacement transducer; the ultimate limits of the technique are set by fundamental phase noise processes. Our results and analysis indicate that mass sensing of individual molecules will be realizable with optimized NEMS devices.


Item Type:Article
Additional Information:©2004 American Institute of Physics. (Received 6 January 2004; accepted 26 March 2004; published online 14 May 2004) The authors gratefully acknowledge support for this work from DARPA MTO/MEMS under Caltech Grant No. DABT63-98-1-0012.
Subject Keywords:nanotechnology; mass measurement; sensors; micromechanical devices; resonators; adsorption; molecules; sensitivity
Record Number:CaltechAUTHORS:EKIapl04
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:EKIapl04
Alternative URL:http://dx.doi.org/10.1063/1.1755417
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:2555
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:10 Apr 2006
Last Modified:26 Dec 2012 08:49

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