Ekinci, K. L. and Yang, Y. T. and Roukes, M. L. (2004) Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems. Journal of Applied Physics, 95 (3). pp. 2682-2689. ISSN 0021-8979. http://resolver.caltech.edu/CaltechAUTHORS:EKIjap04
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Nanomechanical resonators can now be realized that achieve fundamental resonance frequencies exceeding 1 GHz, with quality factors (Q) in the range 10^3<=Q<=10^5. The minuscule active masses of these devices, in conjunction with their high Qs, translate into unprecedented inertial mass sensitivities. This makes them natural candidates for a variety of mass sensing applications. Here we evaluate the ultimate mass sensitivity limits for nanomechanical resonators operating in vacuo that are imposed by a number of fundamental physical noise processes. Our analyses indicate that nanomechanical resonators offer immense potential for mass sensing—ultimately with resolution at the level of individual molecules.
|Additional Information:||©2004 American Institute of Physics. (Received 17 September 2003; accepted 26 November 2003) K.L.E. acknowledges financial support from the National Science Foundation under Grant No. 0216274. Y.T.Y. and M.L.R. are grateful to DARPA MTO/MEMS and SPAWAR for supporting this work under Grant No. N66001-01-X-6004/02-8914/1000000928. The authors acknowledge many fruitful conversations with A. Vandelay.|
|Subject Keywords:||Q-factor; noise; sensitivity; nanotechnology; micromechanical resonators; microsensors; mass measurement|
|Usage Policy:||No commercial reproduction, distribution, display or performance rights in this work are provided.|
|Deposited By:||Archive Administrator|
|Deposited On:||10 Apr 2006|
|Last Modified:||26 Dec 2012 08:49|
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