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Portable Graphical Tools for Concurrent Plasma Simulation

Nelson, Bradley D. (1996) Portable Graphical Tools for Concurrent Plasma Simulation. California Institute of Technology , Pasadena, CA. (Unpublished) http://resolver.caltech.edu/CaltechCSTR:1996.cs-tr-96-24

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Abstract

Low pressure reactors (less than 1.5 Torr) are used for etching processes in the microelectronics industry. Hawk, a 3-D concurrent DSMC simulation tool, is used for large-scale simulations of these reactors. In order for Hawk to be convenient for the process engineers who use such tools, XHawk, a graphical interface to Hawk, and XFalcon, the graphical interface to a chemical database used by Hawk, were created. These applications were developed for the X-Windows platform [Nelson95]. In order to make this tool useful to a broader segment of users, and to maintain support for new simulation techniques incorporated into Hawk, a new version of XHawk/XFaIcon has been developed using TcI/Tk. This multiplatform, portable, interface development language has reduced the code size of XHawk/XFalcon, making the applications more manageable and expandable, and at the same time has allowed the incorporation of many new interface features. The XFalcon chemical database system has been expanded to incorporate an improved description of chemical reactions. These interface tools are being used in the microelectronics industry for the design and evaluation of plasma reactors.


Item Type:Report or Paper (Technical Report)
Additional Information:© 1996 California Institute of Technology. The Author would like to acknowledge the support and guidance of Marc Rieffel in this project; with his help XHawk has hopefully become the kind of tool he envisioned over a year ago. The Author would also like to recognize the guidance and support provided in the project by advisor Dr. Stephen Taylor. The research described in the report is sponsored primarily by the Advanced Research Projects Agency under contract number DABT63-96-C-0116. The information contained herein does not necessarily reflect the position or policy of the government of the United States, and no official endorsement should be inferred.
Group:Computer Science Technical Reports
Funders:
Funding AgencyGrant Number
Advanced Research Projects Agency (ARPA)DABT63-96-C-0116
DOI:10.7907/Z9XK8CJ6
Record Number:CaltechCSTR:1996.cs-tr-96-24
Persistent URL:http://resolver.caltech.edu/CaltechCSTR:1996.cs-tr-96-24
Usage Policy:You are granted permission for individual, educational, research and non-commercial reproduction, distribution, display and performance of this work in any format.
ID Code:26803
Collection:CaltechCSTR
Deposited By: Imported from CaltechCSTR
Deposited On:25 Apr 2001
Last Modified:11 Apr 2017 17:09

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