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The Design and Implementation of a Reticle Maker for VLSI

Gray, Moshe (1981) The Design and Implementation of a Reticle Maker for VLSI. California Institute of Technology . (Unpublished) http://resolver.caltech.edu/CaltechCSTR:1981.4299-tr-81

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Use this Persistent URL to link to this item: http://resolver.caltech.edu/CaltechCSTR:1981.4299-tr-81

Abstract

This paper describes the designing and building of a feedback controlled Reticle Maker for the VLSI industry. The machine is based on an innovative design of an XY photo plotter which utilizes flexures and linear motors as a means to raster scan a photographic plate. The accuracy of the machine is based on Laser Interferometery and feedback control.


Item Type:Report or Paper (Technical Report)
Group:Computer Science Technical Reports
Record Number:CaltechCSTR:1981.4299-tr-81
Persistent URL:http://resolver.caltech.edu/CaltechCSTR:1981.4299-tr-81
Usage Policy:You are granted permission for individual, educational, research and non-commercial reproduction, distribution, display and performance of this work in any format.
ID Code:27028
Collection:CaltechCSTR
Deposited By: Imported from CaltechCSTR
Deposited On:28 Aug 2002
Last Modified:26 Dec 2012 14:12

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