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Yield strength of thin-film parylene-C

Shih, Victor Chi-Yuan and Harder, Theodore A. and Tai, Yu-Chong (2003) Yield strength of thin-film parylene-C. In: DTIP 2003: Design, test, integration and packaging of MEMS/MOEMS. IEEE , Piscataway, N.J., pp. 394-398. ISBN 0-7803-7066-X http://resolver.caltech.edu/CaltechAUTHORS:20111026-074002939

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Abstract

For the first time, the yield strength of thin-film parylene-c is measured from membrane load-deflection experiments and surface profile analysis. To do so, the onset pressure which causes plastic deformation of the membrane is first experimentally measured. Then a new 2-step displacement model, together with the energy minimization technique, is developed to convert the onset pressure to the yield strength on the pre-stressed parylene membrane under a uniform pressure loading. The results depict a Yield Strength of 59 MPa (or 0.012 of strain) for thin-film parylene-c in comparison to 55 MPa reported by parylene vendor (measured from large samples). To double check with the result, the balloon model is further used to compare with the stress value from our model at the center of parylene membranes and good agreements are obtained.


Item Type:Book Section
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http://dx.doi.org/10.1109/DTIP.2003.1287075DOIUNSPECIFIED
http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=1287075&tag=1PublisherUNSPECIFIED
Additional Information:© 2003 IEEE. Date of Current Version: 19 April 2004. This work is supported by the NSF Center for Neuromorphic Systems Engineering (CNSE) at Caltech.
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NSF Center for Neuromorphic Systems Engineering (CNSE)UNSPECIFIED
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INSPEC Accession Number8454706
Record Number:CaltechAUTHORS:20111026-074002939
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20111026-074002939
Official Citation:Victor Chi-Yuan Shih; Harder, T.A.; Yu-Chong Tai; , "Yield strength of thin-film parylene-c," Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on , vol., no., pp. 394- 398, 5-7 May 2003 doi: 10.1109/DTIP.2003.1287075 URL: http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=1287075&isnumber=28693
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:27431
Collection:CaltechAUTHORS
Deposited By: Ruth Sustaita
Deposited On:26 Oct 2011 15:00
Last Modified:26 Oct 2011 15:00

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