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Quality factor issues in silicon carbide nanomechanical resonators

Huang, X. M. H. and Zorman, C. A. and Mehregany, M. and Roukes, M. L. (2003) Quality factor issues in silicon carbide nanomechanical resonators. In: Transducers '03: the 12th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE , Piscataway, N.J., pp. 722-725. ISBN 0-7803-7731-1

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Nanomechanical resonators with fundamental mode resonance frequencies in the Very-High Frequency (VHF), Ultra-High Frequency (UHF) range and microwave L-band are fabricated from monocrystalline silicon carbide thin film material, and measured by magnetomotive transduction, combined with a balanced bridge read out circuit. For resonators made from the same film, we measured the frequency (i.e., geometry) dependence of the quality factor. It is found that the quality factor of these resonators decreases when the frequency increases. This indicates the importance of clamping loss in this regime. In addition, from studies of resonators made from different chips with varying surface roughness, we found a strong correlation between surface roughness of the silicon carbide thin film material and the quality factor of the resonators made from it. Understanding the dissipation mechanisms, and thus improving the quality factor of these resonators, is important for implementing applications promised by these devices.

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Additional Information:© 2003 IEEE. Issue Date: 8-12 June 2003. Date of Current Version: 28 July 2003. This work was generously supported by DARPA MTO/MEMS and NSF.
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Defense Advanced Research Projects Agency (DARPA) UNSPECIFIED
MTO/Micro Electro-Mechanical Systems (MEMS)UNSPECIFIED
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INSPEC Accession Number7936687
Record Number:CaltechAUTHORS:20111028-135927801
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Official Citation:Huang, X.M.H.; Zorman, C.A.; Mehregany, M.; Roukes, M.L.; , "Quality factor issues in silicon carbide nanomechanical resonators," TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003 , vol.1, no., pp. 722- 725 vol.1, 8-12 June 2003 doi: 10.1109/SENSOR.2003.1215575 URL:
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:27498
Deposited By: Ruth Sustaita
Deposited On:28 Oct 2011 21:21
Last Modified:23 Aug 2016 10:06

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