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Theoretical studies of ion bombardment: Many-body interactions

Lo, Davy Y. and Tombrello, Tom A. and Shapiro, Mark H. and Garrison, Barbara J. and Winograd, Nicholas and Harrison, Don E., Jr. (1988) Theoretical studies of ion bombardment: Many-body interactions. Journal of Vacuum Science and Technology A, 6 (3). pp. 708-711. ISSN 0734-2101. http://resolver.caltech.edu/CaltechAUTHORS:LODjvsta88

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Abstract

Many-body forces obtained by the embedded-atom method are incorporated into the description of low-energy collisions and surface ejection processes in molecular dynamics simulations of sputtering from metal targets. Bombardment of small, single-crystal Cu targets (400–500 atoms) in three different orientations ({100}, {110}, {111}) by 5-keV Ar + ions have been simulated. The results are compared to simulations using purely pairwise additive interactions. Significant differences in the spectra of ejected atoms are found.


Item Type:Article
Additional Information:© 1988 American Vacuum Society (Received 18 September 1987; accepted 26 October 1987) This work was supported in part by the National Science Foundation, Grant No. DMR84-21119.
Subject Keywords:ION COLLISIONS; ARGON IONS; COLLISIONS; SPUTTERING; COMPUTERIZED SIMULATION; COPPER; MANY–BODY PROBLEM
Record Number:CaltechAUTHORS:LODjvsta88
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:LODjvsta88
Alternative URL:http://dx.doi.org/10.1116/1.575159
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:2755
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:25 Apr 2006
Last Modified:26 Dec 2012 08:50

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