Huang, Yanyi and Paloczi, George T. and Scheuer, Jacob and Yariv, Amnon (2003) Soft lithography replication of polymeric microring optical resonators. Optics Express, 11 (20). pp. 2452-2458. ISSN 1094-4087 http://resolver.caltech.edu/CaltechAUTHORS:HUAoe03
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We have developed a soft lithography method to replicate polymeric integrated optical devices. In this method, the master device and the molded replica are made of the same materials, allowing direct comparison. To evaluate the quality of the replication, microring optical resonators are chosen as test devices because of their sensitivity to small fabrication errors. The master devices are precisely fabricated using direct electron beam lithography. The replicas are produced by the molding technique and subsequent ultraviolet curing. Compared with the master devices, the molded devices show minimal change in both physical shape and optical performance. This correspondence indicates the merits of soft lithographic methods for fabrication of precision integrated optical devices.
|Additional Information:||© 2003 Optical Society of America. Received August 21, 2003; Revised September 11, 2003. This research was sponsored by the National Science Foundation (NSF) and Defense Advanced Research Projects Agency (DARPA), whose support is gratefully acknowledged. The authors thank John M. Choi,William M. J. Green, Joyce K. S. Poon,Wei Liang, Dr. Yong Xu, and Prof. Shayan Mookherjea for fruitful discussions.|
|Subject Keywords:||OCIS codes: (130.3120) Integrated optics devices; (130.3130) Integrated optics materials; (140.4780) Optical resonators; (160.5470) Polymers; (250.5460) Polymer waveguide-fibers|
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|Deposited By:||Archive Administrator|
|Deposited On:||16 May 2005|
|Last Modified:||26 Dec 2012 08:39|
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