CaltechAUTHORS
  A Caltech Library Service

Surface-micromachined Ta-Si-N beams for use in micromechanics

Grétillat, M.-A. and Linder, C. and Dommann, A. and Staufert, G. and de Rooij, N. F. and Nicolet, M.-A. (1998) Surface-micromachined Ta-Si-N beams for use in micromechanics. Journal of Micromechanics and Microengineering, 8 (2). pp. 88-90. ISSN 0960-1317. http://resolver.caltech.edu/CaltechAUTHORS:20111222-090724822

Full text is not posted in this repository. Consult Related URLs below.

Use this Persistent URL to link to this item: http://resolver.caltech.edu/CaltechAUTHORS:20111222-090724822

Abstract

Realization and characterization of free-standing surface-microstructures based on Ta-Si-N films are presented. Due to their significant physical and chemical properties, such ternary films are promising candidates for application in microelectromechanical devices.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1088/0960-1317/8/2/011 DOIUNSPECIFIED
http://iopscience.iop.org/0960-1317/8/2/011/PublisherUNSPECIFIED
Additional Information:© 1998 IOP Publishing Ltd. Received 12 August 1997, accepted for publication 2 December 1997.
Subject Keywords:Electronics and devices; Instrumentation and measurement; Nanoscale science and low-D systems
Classification Code:PACS: 85.85.+j; 07.10.Cm; 85.40.-e
Record Number:CaltechAUTHORS:20111222-090724822
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20111222-090724822
Official Citation:Surface-micromachined Ta-Si-N beams for use in micromechanics M-A Grétillat et al 1998 J. Micromech. Microeng. 8 88
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:28563
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:22 Dec 2011 23:29
Last Modified:22 Dec 2011 23:29

Repository Staff Only: item control page