Grétillat, M.-A. and Linder, C. and Dommann, A. and Staufert, G. and de Rooij, N. F. and Nicolet, M.-A. (1998) Surface-micromachined Ta-Si-N beams for use in micromechanics. Journal of Micromechanics and Microengineering, 8 (2). pp. 88-90. ISSN 0960-1317 http://resolver.caltech.edu/CaltechAUTHORS:20111222-090724822
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Abstract
Realization and characterization of free-standing surface-microstructures based on Ta-Si-N films are presented. Due to their significant physical and chemical properties, such ternary films are promising candidates for application in microelectromechanical devices.
| Item Type: | Article |
|---|---|
| Additional Information: | © 1998 IOP Publishing Ltd. Received 12 August 1997, accepted for publication 2 December 1997. |
| Subject Keywords: | Electronics and devices; Instrumentation and measurement; Nanoscale science and low-D systems |
| Classification Code: | PACS: 85.85.+j; 07.10.Cm; 85.40.-e |
| Record Number: | CaltechAUTHORS:20111222-090724822 |
| Persistent URL: | http://resolver.caltech.edu/CaltechAUTHORS:20111222-090724822 |
| Related URLs: | |
| Official Citation: | Surface-micromachined Ta-Si-N beams for use in micromechanics M-A Grétillat et al 1998 J. Micromech. Microeng. 8 88 |
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. |
| ID Code: | 28563 |
| Collection: | CaltechAUTHORS |
| Deposited By: | Tony Diaz |
| Deposited On: | 22 Dec 2011 23:29 |
| Last Modified: | 22 Dec 2011 23:29 |
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