Marx, D. S. and Psaltis, D. (1997) Polarization quadrature measurement of subwavelength diffracting structures. Applied Optics, 36 (25). pp. 6434-6440. ISSN 0003-6935. http://resolver.caltech.edu/CaltechAUTHORS:20120130-072241378
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The amplitude and the phase of the diffracted far field depends on polarization when the diffracting structure is comparable to or less than the wavelength. When the far-field amplitude and the phase of one polarization with respect to the orthogonal polarization is measured, small changes in the structure can be measured. To make the far-field polarization measurements, we design a detector that measures the relative polarization amplitude and the phase in quadrature. We predict numerically and verify experimentally the polarization amplitude and the phase for an optical disc and a set of gratings with varying depth. Our results show that this measurement technique is sensitive to small variations in the diffracting structure and that it can be useful in applications such as critical dimension and overlay metrology in microelectronics fabrication.
|Additional Information:||© 1997 Optical Society of America. Received 17 June 1996; revised manuscript received 9 December 1996. We are grateful to Seiji Kobayashi and Masanobu Yamamoto of the Sony Research Laboratories for supplying us with an example of a DVD. We are equally grateful to Dean Faklis of RPC for the sample containing gratings of various depths, and to Dan Wilson of the Jet Propulsion Laboratory for atomic force microscope measurements of the gratings. The research presented here was funded in part by the National Science Foundation Center for Neuromorphic Systems Engineering at the California Institute of Technology.|
|Subject Keywords:||Vector diffraction, metrology, scatterometry, optical disk memories.|
|Official Citation:||D. S. Marx and D. Psaltis, "Polarization quadrature measurement of subwavelength diffracting structures," Appl. Opt. 36, 6434-6440 (1997)|
|Usage Policy:||No commercial reproduction, distribution, display or performance rights in this work are provided.|
|Deposited By:||Ruth Sustaita|
|Deposited On:||30 Jan 2012 16:45|
|Last Modified:||26 Dec 2012 14:45|
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