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Fabrication, modeling, and characterization of form-birefringent nanostructures

Xu, Fang and Tyan, Rong-Chung and Sun, Pang-Chen and Fainman, Yeshayahu and Cheng, Chuan-Cheng and Scherer, Axel (1995) Fabrication, modeling, and characterization of form-birefringent nanostructures. Optics Letters, 20 (24). pp. 2457-2459. ISSN 0146-9592. http://resolver.caltech.edu/CaltechAUTHORS:XUFol95

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Abstract

A 490-nm-deep nanostructure with a period of 200 nm was fabricated in a GaAs substrate by use of electron-beam lithography and dry-etching techniques. The form birefringence of this microstructure was studied numerically with rigorous coupled-wave analysis and compared with experimental measurements at a wavelength of 920 nm. The numerically predicted phase retardation of 163.3 degrees was found to be in close agreement with the experimentally measured result of 162.5 degrees, thereby verifying the validity of our numerical modeling. The fabricated microstructures show extremely large artificial anisotropy compared with that available in naturally birefringent materials and are useful for numerous polarization optics applications.


Item Type:Article
Additional Information:© 1995 Optical Society of America Received August 15, 1995 This study was funded by the National Science Foundation, the U.S. Air Force Office for Scientific Research, the Optical Technology Center of the Advanced Research Projects Agency, and the Rome Laboratory.
Record Number:CaltechAUTHORS:XUFol95
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:XUFol95
Alternative URL:http://www.opticsinfobase.org/abstract.cfm?URI=ol-20-24-2457
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:2934
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:07 May 2006
Last Modified:26 Dec 2012 08:51

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