CaltechAUTHORS
  A Caltech Library Service

Latent image diffraction from submicron photoresist gratings

Yoon, Euijoon and Green, Christian A. and Gottscho, Richard A. and Hayes, Todd R. and Giapis, Konstantinos P. (1992) Latent image diffraction from submicron photoresist gratings. Journal of Vacuum Science and Technology B, 10 (5). pp. 2230-2233. ISSN 1071-1023. http://resolver.caltech.edu/CaltechAUTHORS:20120322-135630455

[img]
Preview
PDF - Published Version
See Usage Policy.

413Kb

Use this Persistent URL to link to this item: http://resolver.caltech.edu/CaltechAUTHORS:20120322-135630455

Abstract

Light scattering from latent images in photoresist is useful for lithographic tool characterization, process monitoring, and process control. In particular, closed‐loop control of lithographic processes is critical for high yield, low cost device manufacturing. In this work, we report use of pulsed laser diffraction from photoresist latent images in 0.24 μm pitch distributed feedback laser gratings. Gated detection of pulsed light scattering permits high spatial resolution probing using ultraviolet light without altering the latent image. A correlation between latent image and etched grating diffraction efficiencies is demonstrated and shows the value of "upstream" monitoring.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1116/1.586194 DOIUNSPECIFIED
http://avspublications.org/jvstb/resource/1/jvtbd9/v10/i5/p2230_s1PublisherUNSPECIFIED
Additional Information:© 1992 American Vacuum Society. Received 6 April 1992; accepted 17 June 1992.
Subject Keywords:PHOTORESISTS, LITHOGRAPHY, LIGHT DIFFRACTION, GRATINGS, IMAGES, SPATIAL RESOLUTION, CONTROL SYSTEMS
Classification Code:PACS: 85.40.Hp
Record Number:CaltechAUTHORS:20120322-135630455
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20120322-135630455
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:29815
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:17 Apr 2012 22:18
Last Modified:26 Dec 2012 14:58

Repository Staff Only: item control page