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Real-time monitoring of low-temperature hydrogen plasma passivation of GaAs

Gottscho, Richard A. and Preppernau, Bryan L. and Pearton, Stephen J. and Emerson, A. Bruce and Giapis, Konstantinos P. (1990) Real-time monitoring of low-temperature hydrogen plasma passivation of GaAs. Journal of Applied Physics, 68 (2). pp. 440-445. ISSN 0021-8979. http://resolver.caltech.edu/CaltechAUTHORS:20120424-091127667

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Abstract

By monitoring photoluminescence (PL) in real time and in situ, hydrogen plasma operating conditions have been optimized for surface passivation of native-oxide-contaminated GaAs. PL enhancement is critically dependent on exposure time and pressure because of competition between plasma passivation and damage. Optimal exposure time and pressure are inversely related; thus, previous reports of ineffective passivation at room temperature result from overexposure at low pressure. Plasma treatment is effective in removing As to leave a Ga-rich oxide; removal of excess As increases the photoluminescence yield as the corresponding near-midgap-state density is reduced. Passivation is stable for more than a month. These results demonstrate the power of real time monitoring for optimizing plasma processing of optoelectronic materials.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1063/1.346813 DOIUNSPECIFIED
http://jap.aip.org/resource/1/japiau/v68/i2/p440_s1PublisherUNSPECIFIED
Additional Information:© 1990 American Institute of Physics. Received 26 January 1990; accepted for publication 27 March 1990. We are grateful to W. C. Dautremont-Smith, T. K Hayes, and Y. H. Lee for helpful suggestions and stimulating discussions and to G. R. Scheller and F. Ren for experimental assistance. We are also grateful to T. Harris and M. Lamont- Schnoes for examining the low-temperature PL spectra of both passivated and unpassivated samples.
Subject Keywords:GALLIUM ARSENIDES, HYDROGEN, PLASMA, PASSIVATION, SURFACES, PHOTOLUMINESCENCE, SURFACE STATES, OXIDES
Classification Code:PACS: 78.55.Cr; 78.55.Cr; 81.65.-b; 52.90.+z
Record Number:CaltechAUTHORS:20120424-091127667
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20120424-091127667
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:30271
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:01 May 2012 21:07
Last Modified:26 Dec 2012 15:06

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