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Quantitative measurement of the composition of Al_xGa_(1−x)As heterostructures using a simple backscattered electron detector

Sercel, Peter C. and Lebens, John A. and Vahala, Kerry J. (1989) Quantitative measurement of the composition of Al_xGa_(1−x)As heterostructures using a simple backscattered electron detector. Review of Scientific Instruments, 60 (12). pp. 3775-3778. ISSN 0034-6748. http://resolver.caltech.edu/CaltechAUTHORS:20120517-095740025

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Abstract

We describe a technique for the quantitative measurement of composition in Al_xGa_(1−x)As heterostructures using a simple solid‐state backscattered electron detector in a scanning electron microscope. Calibration data are presented and are shown to be consistent with the Castaing [Adv. Electron. Electron Phys. 13, 317 (1960)] theory. The technique is applied to image representative Al_xGa_(1−x)As heterostructures including a graded index separate confinement heterostructure (GRINSCH) laser structure.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1063/1.1140489 DOIUNSPECIFIED
http://rsi.aip.org/resource/1/rsinak/v60/i12/p3775_s1PublisherUNSPECIFIED
Additional Information:© 1989 American Institute of Physics. Received 19 June 1989; accepted for publication 31 August 1989. The authors would like to thank Lars Eng for supplying MBE material and growth calibration data. This work was supported by the Office of Naval Research and SDIO-ISTC. P.C.S. would like to acknowledge support under a NSF Graduate Fellowship.
Funders:
Funding AgencyGrant Number
Office of Naval Research (ONR)UNSPECIFIED
SDIO-ISTCUNSPECIFIED
NSF Graduate FellowshipUNSPECIFIED
Subject Keywords:ALUMINIUM ARSENIDES, GALLIUM ARSENIDES, DETECTORS, HETEROSTRUCTURES, SCANNING ELECTRON MICROSCOPY, BACKSCATTERING, DESIGN, CALIBRATION, CHEMICAL COMPOSITION, FABRICATION
Classification Code:PACS: 07.79.Cz; 61.05.-a; 71.55.Eq
Record Number:CaltechAUTHORS:20120517-095740025
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20120517-095740025
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:31524
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:22 May 2012 18:19
Last Modified:26 Dec 2012 15:13

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