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Epitaxial growth of GaAs by solid-phase transport

Chen, J. S. and Kolawa, E. and Garland, C. M. and Nicolet, M-A. (1991) Epitaxial growth of GaAs by solid-phase transport. Applied Physics Letters, 59 (13). pp. 1597-1599. ISSN 0003-6951. http://resolver.caltech.edu/CaltechAUTHORS:CHEapl91

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Abstract

(100) GaAs substrates with an Ag film about 45 nm thick were first annealed at 550-degrees-C for 30 min in an Ar-flowing furnace (preannealing). A 110-nm-thick GaAs layer was then deposited on top of the preannealed <GaAs>/Ag samples, followed by an amorphous Ta-Si-N film that was deposited over the GaAs layer to serve as a cap layer to minimize the loss of As during the following annealing process. The completed structures were then annealed again at 550-degrees-C for 30 min in flowing Ar. The transport of Ga and As through the Ag layer and an epitaxial growth of GaAs on top of the (100) GaAs substrate are observed by cross-sectional transmission electron microscopy and MeV He-4 backscattering spectrometry. No GaAs epitaxial growth is observed in samples that are not preannealed. Our results demonstrate that epigrowth through a solid transport medium is possible for a III-V semiconductor as it is for Si and Ge.


Item Type:Article
Additional Information:Copyright © 1991 American Institute of Physics. Received 8 April 1991; accepted 1 July 1991. This work was supported by the Army Research Office under a contract aiming at the development of stable contacts to semiconductors. The authors wish to thank Dr. Simon C. W. Nieh for valuable advice in transmission electron microscopy work and helpful discussions.
Subject Keywords:GALLIUM ARSENIDES; SOLID–PHASE EPITAXY; ANNEALING; ATOM TRANSPORT; TRANSMISSION ELECTRON MICROSCOPY; RBS; SILVER
Record Number:CaltechAUTHORS:CHEapl91
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:CHEapl91
Alternative URL:http://dx.doi.org/10.1063/1.106267
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:3214
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:22 May 2006
Last Modified:26 Dec 2012 08:53

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