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A structure marker study for Pd_2Si formation: Pd moves in epitaxial Pd_2Si

Lien, C.-D. and Nicolet, M.-A. and Pai, C. S. (1985) A structure marker study for Pd_2Si formation: Pd moves in epitaxial Pd_2Si. Journal of Applied Physics, 57 (2). pp. 224-226. ISSN 0021-8979. http://resolver.caltech.edu/CaltechAUTHORS:20120628-081537763

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Abstract

A sample with the configuration Si (111)/single crystalline Pd_2Si/polycrystalline Pd_2Si/Pd is used to study the dominant moving species during subsequent Pd_2Si formation by annealing at 275 °C. The interface between monocrystalline and polycrystalline Pd_2Si is used as a marker to monitor the dominant moving species. The result shows that Pd is the dominant moving species in the monocrystal.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1063/1.334792DOIUNSPECIFIED
http://jap.aip.org/resource/1/japiau/v57/i2/p224_s1PublisherUNSPECIFIED
Additional Information:© 1985 American Institute of Physics. Received 13 June 1984; accepted 17 July 1984. The authors acknowledge I. Suni, and Dr. S. S. Lau, Dr. D. M. Scott, Dr. M. Bartur, and Dr. K. T. Bruce Ho for helpful discussions. One author at University of California at San Diego (C. S. Pai) acknowledges the financial support of DARPA (S. Roosild). Authors at Caltech acknowledge the partial financial support by the National Aeronautic and Space Administration and monitored by the Jet Propulsion Laboratory, California Institute of Technology (D. Burger).
Funders:
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
NASAUNSPECIFIED
Subject Keywords:PALLADIUM SILICIDES, SILICON, ANNEALING, SYNTHESIS, PALLADIUM, SELF−DIFFUSION, ATOM TRANSPORT, EPITAXIAL LAYERS, MONOCRYSTALS
Classification Code:PACS: 68.55.-a, 68.60.-p, 66.30.Fq
Record Number:CaltechAUTHORS:20120628-081537763
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20120628-081537763
Official Citation:A structure marker study for Pd2Si formation: Pd moves in epitaxial Pd2Si C.‐D. Lien, M‐A. Nicolet, and C. S. Pai J. Appl. Phys. 57, 224 (1985); http://dx.doi.org/10.1063/1.334792
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:32167
Collection:CaltechAUTHORS
Deposited By: Ruth Sustaita
Deposited On:28 Jun 2012 17:42
Last Modified:26 Dec 2012 15:25

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