CaltechAUTHORS
  A Caltech Library Service

Lithographic band gap tuning in photonic band gap crystals

Cheng, C. C. and Scherer, A. and Arbet-Engels, V. and Yablonovitch, E. (1996) Lithographic band gap tuning in photonic band gap crystals. Journal of Vacuum Science and Technology B, 14 (6). pp. 4110-4114. ISSN 1071-1023. http://resolver.caltech.edu/CaltechAUTHORS:CHEjvstb96

[img]
Preview
PDF
See Usage Policy.

3280Kb

Use this Persistent URL to link to this item: http://resolver.caltech.edu/CaltechAUTHORS:CHEjvstb96

Abstract

We describe the lithographic control over the spectral response of three-dimensional photonic crystals. By precise microfabrication of the geometry using a reproducible and reliable procedure consisting of electron beam lithography followed by dry etching, we have shifted the conduction band of crystals within the near-infrared. Such microfabrication has enabled us to reproducibly define photonic crystals with lattice parameters ranging from 650 to 730 nm. In GaAs semiconductor wafers, these can serve as high-reflectivity (> 95%) mirrors. Here, we show the procedure used to generate these photonic crystals and describe the geometry dependence of their spectral response.


Item Type:Article
Additional Information:©1996 American Vacuum Society (Received 10 June 1996; accepted 17 August 1996) This work was supported by the National Science Foundation under Grant No. ECS-9310681. The authors also gratefully acknowledge helpful suggestions from Reynold Johnson and Andrew Cleland.
Subject Keywords:OPTOELECTRONIC DEVICES; OPTICAL MATERIALS; GALLIUM ARSENIDES; LITHOGRAPHY; ELECTRON BEAMS; ETCHING; ION BEAMS; CRYSTAL STRUCTURE; LATTICE PARAMETERS; BAND STRUCTURE; NEAR INFRARED RADIATION; MIRRORS; SPECTRAL RESPONSE; REFLECTIVITY
Record Number:CaltechAUTHORS:CHEjvstb96
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:CHEjvstb96
Alternative URL:http://dx.doi.org/10.1116/1.588601
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:3227
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:23 May 2006
Last Modified:26 Dec 2012 08:53

Repository Staff Only: item control page