Golecki, I. and Rossel, J. (1980) Advanced undergraduate experiments in vacuum physics and mass spectrometry. Journal of Vacuum Science and Technology, 17 (1). pp. 66-68. ISSN 0022-5355. http://resolver.caltech.edu/CaltechAUTHORS:20120719-091359800
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A comprehensive high‐vacuum system has been set up and operated in an advanced undergraduate laboratory for students majoring in physics and microelectronics. The aim of the experiment is to provide the students with both practical experience and basic theoretical understanding of the production and measurement of low pressures. The students measure the pumping speed of a rotary forepump and of an oil diffusion pump, as a function of pressure, using procedures adopted by the AVS. A hot‐cathode ionization gauge and a thermocouple gauge are calibrated against a McLeod (absolute) manometer for several gases. The compositions of ambient air, of an isotopic mixture of neon, and of the residual gases in an oil‐diffusion‐pumped system are determined with the aid of a mass spectrometer. The influence of a liquid‐nitrogen‐cooled surface is assessed. Helium leak detection is demonstrated, and the response and sensitivity of the mass spectrometer as a leak detector are evaluated.
|Additional Information:||© 1980 American Vacuum Society. Received 15 August 1979; accepted 29 November 1979. The authors wish to acknowledge the expert technical assistance of J. S. Margot, and the financial support of the Canton of Neuchâtel, Department of Education. Work performed at Institut de Physique de l'Université, 2000 Neuchâtel, Switzerland.|
|Subject Keywords:||VACUUM SYSTEMS, BENCH−SCALE EXPERIMENTS, VACUUM PUMPS, IONIZATION GAGES, THERMOCOUPLES, MASS SPECTROMETERS, LEAK DETECTORS|
|Classification Code:||PACS: 01.50.Pa, 47.80. + v, 07.30.Hd, 47.80.-v|
|Official Citation:||Advanced undergraduate experiments in vacuum physics and mass spectrometry I. Golecki and J. Rossel J. Vac. Sci. Technol. 17, 66 (1980); http://dx.doi.org/10.1116/1.570506|
|Usage Policy:||No commercial reproduction, distribution, display or performance rights in this work are provided.|
|Deposited By:||Ruth Sustaita|
|Deposited On:||19 Jul 2012 16:47|
|Last Modified:||26 Dec 2012 15:37|
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