CaltechAUTHORS
  A Caltech Library Service

Rapid growth of Si by solid‐phase epitaxy, including comparisons to conventional Si crystal growth

Boatright, R. L. and McCaldin, J. O. (1976) Rapid growth of Si by solid‐phase epitaxy, including comparisons to conventional Si crystal growth. Journal of Vacuum Science and Technology, 13 (4). pp. 938-939. ISSN 0022-5355. http://resolver.caltech.edu/CaltechAUTHORS:20120725-094120934

[img]
Preview
PDF - Published Version
See Usage Policy.

1099Kb

Use this Persistent URL to link to this item: http://resolver.caltech.edu/CaltechAUTHORS:20120725-094120934

Abstract

A recent development in solid‐phase epitaxy is discussed, namely, that Si can be rapidly grown back into a dissolved pit in a (111) Si substrate to just exactly fill the pit, at which time growth ceases. This growth process is driven by the nearby dissolution of amorphous Si and, unlike most conventional growth processes, is not a near‐equilibrium process. Also the solid‐state growth is strongly affected by volume changes occurring during growth.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1116/1.569025DOIUNSPECIFIED
http://link.aip.org/link/doi/10.1116/1.569025PublisherUNSPECIFIED
Additional Information:© 1976 American Vacuum Society. Received 23 February 1976; in final form 5 April 1976. Supported in part by the Office of Naval Research.
Funders:
Funding AgencyGrant Number
Office of Naval Research (ONR)UNSPECIFIED
Classification Code:PACS: 68.50.+j, 61.50.Cj, 81.20.-n, 85.30.-z
Record Number:CaltechAUTHORS:20120725-094120934
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20120725-094120934
Official Citation:Rapid growth of Si by solid-phase epitaxy, including comparisons to conventional Si crystal growth R. L. Boatright and J. O. McCaldin, J. Vac. Sci. Technol. 13, 938 (1976), DOI:10.1116/1.569025
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:32702
Collection:CaltechAUTHORS
Deposited By: Jason Perez
Deposited On:25 Jul 2012 18:39
Last Modified:26 Dec 2012 15:43

Repository Staff Only: item control page