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Secondary fluorescent excitation in the scanning electron microscope: Improved sensitivity of energy dispersive analysis

Gould, R. W. and Healey, J. T. (1975) Secondary fluorescent excitation in the scanning electron microscope: Improved sensitivity of energy dispersive analysis. Review of Scientific Instruments, 46 (10). pp. 1427-1428. ISSN 0034-6748. http://resolver.caltech.edu/CaltechAUTHORS:20120814-152848159

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Abstract

The use of secondary fluorescence for x‐ray energy spectroscopy in the scanning electron microscope has greatly enhanced both resolution and the lower limit of detection. This note describes a simple secondary fluorescence system. The x‐ray energy spectra taken from a stainless steel sample illustrate the advantages of this method.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1063/1.1134022DOIUNSPECIFIED
http://rsi.aip.org/resource/1/rsinak/v46/i10/p1427_s1PublisherUNSPECIFIED
Additional Information:© 1975 American Institute of Physics. Received 27 June 1975. Online Publication Date: 2 September 2008.
Subject Keywords: X−RAY SPECTROSCOPY, ENERGY SPECTRA, FLUORESCENCE, SENSITIVITY, RESOLUTION, STAINLESS STEELS, ELECTRON MICROSCOPES
Classification Code:PACS: 07.78.+s, 07.85.-m
Record Number:CaltechAUTHORS:20120814-152848159
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20120814-152848159
Official Citation: Secondary fluorescent excitation in the scanning electron microscope: Improved sensitivity of energy dispersive analysis R. W. Gould and J. T. Healey Rev. Sci. Instrum. 46, 1427 (1975); http://dx.doi.org/10.1063/1.1134022
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:33189
Collection:CaltechAUTHORS
Deposited By: Ruth Sustaita
Deposited On:14 Aug 2012 22:50
Last Modified:26 Dec 2012 15:59

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