Huang, Yanyi and Paloczi, George T. and Poon, Joyce K. S. and Yariv, Amnon (2004) Bottom-up soft-lithographic fabrication of three-dimensional multilayer polymer integrated optical microdevices. Applied Physics Letters, 85 (15). pp. 3005-3007. ISSN 0003-6951. http://resolver.caltech.edu/CaltechAUTHORS:HUAapl04e
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We develop a method to efficiently fabricate three-dimensional multilayer polymer microchips for integrated optical applications. This method uses soft lithography to mold the core structures on top of the cladding, layers. By repeating the process, a three-dimensional multilayer integrated optical microdevice, which consists of several layers of individual planar optical devices, is fabricated. We demonstrate a dual-layer microring resonator optical filter device where the devices in the different layers show essentially identical transmission responses.
|Additional Information:||©2004 American Institute of Physics. Received 21 May 2004; accepted 5 August 2004. Financial support from the National Science Foundation and Defense Advanced Research Projects Agency (Dr. D. Honey and Dr. R. Athale) is gratefully acknowledged.|
|Subject Keywords:||integrated optics; optical multilayers; polymer films; lithography; optical resonators; cladding techniques; optical fibre cladding; optical fibre filters; optical planar waveguides; optical polymers; optical fibre fabrication|
|Usage Policy:||No commercial reproduction, distribution, display or performance rights in this work are provided.|
|Deposited By:||Tony Diaz|
|Deposited On:||08 Jun 2006|
|Last Modified:||26 Dec 2012 08:54|
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