Brewer, Rhett T. and Atwater, Harry A. (2002) Rapid biaxial texture development during nucleation of MgO thin films during ion beam-assisted deposition. Applied Physics Letters, 80 (18). pp. 3388-3390. ISSN 0003-6951 http://resolver.caltech.edu/CaltechAUTHORS:BREapl02
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We propose a mechanism for the nucleation of highly aligned biaxially textured MgO on amorphous Si3N4 during ion beam-assisted deposition. Using transmission electron microscopy, reflection high-energy electron diffraction, energy dispersive x-ray analysis, and ellipsometery, we have observed that highly aligned biaxially textured grains emerge from a "diffraction-amorphous" film when the film thickens from 3.5 to 4.5 nm. Transmission electron microscopy dark-field images also show the onset of rapid grain growth during this same film thickness interval. These results suggest biaxial texturing through aligned solid phase crystallization.
|Additional Information:||©2002 American Institute of Physics. Received 8 February 2002; accepted 5 March 2002. This work was supported by the DARPA VIP III program, ARO MURI Grant No. DAAD 19-01-1-0517, and the Intel Foundation.|
|Subject Keywords:||magnesium compounds; ion beam assisted deposition; nucleation; transmission electron microscopy; reflection high energy electron diffraction; X-ray chemical analysis; ellipsometry; grain growth; crystallisation; texture|
|Usage Policy:||No commercial reproduction, distribution, display or performance rights in this work are provided.|
|Deposited By:||Tony Diaz|
|Deposited On:||13 Jul 2006|
|Last Modified:||26 Dec 2012 08:56|
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