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Surface-micromachined Ta–Si–N beams for use in micromechanics

Grétillat, M.-A. and Linder, C. and Dommann, A. and Staufert, G. and de Rooij, N. F. and Nicolet, M. A. (1998) Surface-micromachined Ta–Si–N beams for use in micromechanics. Journal of Micromechanics and Microengineering, 8 (2). pp. 88-90. ISSN 0960-1317. http://resolver.caltech.edu/CaltechAUTHORS:GREjmm98

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Abstract

Realization and characterization of free-standing surface-microstructures based on Ta-Si-N films are presented. Due to their significant physical and chemical properties, such ternary films are promising candidates for application in microelectromechanical devices.


Item Type:Article
Additional Information:© 1998 IOP Publishing Ltd. Received 12 August 1997, accepted for publication 2 December 1997. Print publication: Issue 2 (June 1998).
Record Number:CaltechAUTHORS:GREjmm98
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:GREjmm98
Alternative URL:http://stacks.iop.org/0960-1317/8/88
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:390
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:08 Jun 2005
Last Modified:26 Dec 2012 08:39

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