Grétillat, M.-A. and Linder, C. and Dommann, A. and Staufert, G. and de Rooij, N. F. and Nicolet, M. A. (1998) Surface-micromachined Ta–Si–N beams for use in micromechanics. Journal of Micromechanics and Microengineering, 8 (2). pp. 88-90. ISSN 0960-1317 http://resolver.caltech.edu/CaltechAUTHORS:GREjmm98
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Realization and characterization of free-standing surface-microstructures based on Ta-Si-N films are presented. Due to their significant physical and chemical properties, such ternary films are promising candidates for application in microelectromechanical devices.
|Additional Information:||© 1998 IOP Publishing Ltd. Received 12 August 1997, accepted for publication 2 December 1997. Print publication: Issue 2 (June 1998).|
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|Deposited On:||08 Jun 2005|
|Last Modified:||26 Dec 2012 08:39|
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