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Novel Parylene fabrication technologies for microfluidic systems with reduced mass, volume, and power consumption

Satsanarukkit, P. and van Zyl, J. J. and Hoffmann, M. R. (2013) Novel Parylene fabrication technologies for microfluidic systems with reduced mass, volume, and power consumption. In: 2013 Transducers & Eurosensors XXVII. IEEE , Piscataway, NJ, pp. 155-158. ISBN 9781467359818. http://resolver.caltech.edu/CaltechAUTHORS:20140520-105608182

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Abstract

This paper presents new fabrication technologies and materials for microfluidic systems with reduced mass, volume, and power consumption. A general microfluidic platform consists of sample preparation, processing and detection. The system requires various fluidic components, e.g., reagent and waste reservoirs, micromixers, microreactors. To fabricate these different components, we have developed four new Parylene microfluidic technologies that are capable of fabricating various features whether they are small (microns), large (centimeters), long (meters), complex, 2D, or 3D. The first Parylene-D microfluidic components are demonstrated. The developed technologies are very promising for portable and in situ detection especially for space mission and field-deployable application.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6626725&tag=1PublisherArticle
http://dx.doi.org/10.1109/Transducers.2013.6626725DOIArticle
Additional Information:© 2013 IEEE. The authors thank the Bill & Melinda Gates Foundation (BMGF Grant OPP109500) and the California Institute of Technology Office of Graduate Studies.
Funders:
Funding AgencyGrant Number
Bill and Melinda Gates FoundationOPP109500
Caltech Office of Graduate StudiesUNSPECIFIED
Subject Keywords:Parylene-D, Parylene-C, Microfluidics
Record Number:CaltechAUTHORS:20140520-105608182
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20140520-105608182
Official Citation:Satsanarukkit, P.; van Zyl, J.J.; Hoffmann, M.R., "Novel Parylene fabrication technologies for microfluidic systems with reduced mass, volume, and power consumption," Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on , vol., no., pp.155,158, 16-20 June 2013 doi: 10.1109/Transducers.2013.6626725
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:45846
Collection:CaltechAUTHORS
Deposited By: Ruth Sustaita
Deposited On:27 May 2014 22:07
Last Modified:27 May 2014 22:07

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