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Submicron silicon powder production in an aerosol reactor

Wu, Jin Jwang and Flagan, Richard C. and Gregory, Otto J. (1986) Submicron silicon powder production in an aerosol reactor. Applied Physics Letters, 49 (2). pp. 82-84. ISSN 0003-6951. http://resolver.caltech.edu/CaltechAUTHORS:WUJapl86

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Abstract

Powder synthesis by thermally induced vapor phase reactions is described. The powder generated by this technique consists of spherical, nonagglomerated particles of high purity. The particles are uniform in size, in the 0.1–0.2 µm size range. Most of the particles are crystalline spheres. A small fraction of the spheres are amorphous. Chain agglomerates account for less than 1% of the spherules.


Item Type:Article
Additional Information:Copyright © 1986 American Institute of Physics (Received 24 February 1986; accepted 19 May 1986) This work was supported in part by the Flat Plate Solar Array Project, Jet Propulsion Laboratory, California Institute of Technology sponsored by the U.S. Department of Energy through an agreement with NASA.
Subject Keywords:SILICON; SYNTHESIS; FABRICATION; MICROSPHERES; POWDERS; CHEMICAL VAPOR DEPOSITION; POWDER METALLURGY; SPHEROIDS
Record Number:CaltechAUTHORS:WUJapl86
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:WUJapl86
Alternative URL:http://dx.doi.org/10.1063/1.97358
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:4719
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:05 Sep 2006
Last Modified:26 Dec 2012 09:01

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