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Published August 2014 | public
Journal Article

Detector Fabrication Yield for SuperCDMS Soudan

Abstract

The SuperCDMS collaboration is presently operating a 9 kg Ge payload at the Soudan Underground Laboratory in their direct search for dark matter. The Ge detectors utilize double-sided athermal phonon sensors with an interdigitated electrode structure (iZIPs) to reject near-surface electron-recoil events. These detectors each have a mass of 0.6 kg and were fabricated with photolithographic techniques. The detector fabrication advances required and the production yield encountered are described.

Additional Information

© 2014 Springer Science+Business Media New York. Received: 19 July 2013; Accepted: 23 January 2014; Published online: 21 February 2014. This work is supported in part by the Department of Energy and the National Science Foundation. These iZIP detectors were fabricated in the Stanford Nanofabrication Facility, a member of the National Nanotechnology Infrastructure Network.

Additional details

Created:
August 22, 2023
Modified:
October 26, 2023