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Dynamical x-ray diffraction from nonuniform crystalline films: Application to x-ray rocking curve analysis

Wie, C. R. and Tombrello, T. A. and Vreeland, T., Jr. (1986) Dynamical x-ray diffraction from nonuniform crystalline films: Application to x-ray rocking curve analysis. Journal of Applied Physics, 59 (11). pp. 3743-3746. ISSN 0021-8979. http://resolver.caltech.edu/CaltechAUTHORS:WIEjap86

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Abstract

A dynamical model for the general case of Bragg x-ray diffraction from arbitrarily thick nonuniform crystalline films is presented. The model incorporates depth-dependent strain and a spherically symmetric Gaussian distribution of randomly displaced atoms and can be applied to the rocking curve analysis of ion-damaged single crystals and strained layer superlattices. The analysis of x-ray rocking curves using this model provides detailed strain and damage depth distributions for ion-implanted or MeV-ion-bombarded crystals and layer thickness, and lattice strain distributions for epitaxial layers and superlattices. The computation time using the dynamical model is comparable to that using a kinematical model. We also present detailed strain and damage depth distributions in MeV-ion-bombarded GaAs(100) crystals. The perpendicular strain at the sample surface, measured as a function of ion-beam dose (D), nuclear stopping power (Sn), and electronic stopping power (Se) is shown to vary according to (1–kSe)DSn and saturate at high doses.


Item Type:Article
Additional Information:Copyright © 1986 American Institute of Physics (Received 9 September 1985; accepted 16 January 1986) This work was supported in part by the National Science Foundation (contract no. DMR 83-18274). Erratum: Dynamical x-ray diffraction from nonuniform crystalline films: Application to x-ray rocking curve analysis [J. Appl. Phys. 59, 3743 (1986)]. C. R. Wie et al. J. Appl. Phys. 70, 2481 (1991)
Subject Keywords:MATHEMATICAL MODELS; X–RAY DIFFRACTION; PHYSICAL RADIATION EFFECTS; GALLIUM ARSENIDES; MEV RANGE; SURFACE PROPERTIES; STRAINS; DAMAGE; STOPPING POWER; THEORETICAL DATA; SUPERLATTICES; CRYSTAL STRUCTURE
Record Number:CaltechAUTHORS:WIEjap86
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:WIEjap86
Alternative URL:http://dx.doi.org/10.1063/1.336759
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:5160
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:03 Oct 2006
Last Modified:26 Dec 2012 09:04

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