CaltechAUTHORS
  A Caltech Library Service

Ti and V layers retard interaction between Al films and polycrystalline Si

Nakamura, K. and Lau, S. S. and Nicolet, M-A. and Mayer, J. W. (1976) Ti and V layers retard interaction between Al films and polycrystalline Si. Applied Physics Letters, 28 (5). pp. 277-280. ISSN 0003-6951. http://resolver.caltech.edu/CaltechAUTHORS:NAKapl76

[img]
Preview
PDF
See Usage Policy.

347Kb

Use this Persistent URL to link to this item: http://resolver.caltech.edu/CaltechAUTHORS:NAKapl76

Abstract

Fine-grained polycrystalline Si (poly Si) in contact with Al films recrystallizes at temperatures well below the Si-Al eutectic (577 °C). We show that this interaction can be deferred or suppressed by placing a buffer layer of Ti or V between the Al film and the poly Si. During annealing, Ti or V form TiAl3 or Val3 at the buffer-layer–Al-film interface, but do not react with the poly Si so that the integrity of the poly Si is preserved as long as some unreacted Ti or V remains. The reaction between the Ti or V layer and the Al film is transport limited ([proportional]t^1/2) and characterized by the diffusion constants 1.5×10^15 exp(–1.8eV/kT) Å^2/sec or 8.4×10^12 exp(–1.7eV/kT) Å^2/sec, respectively.


Item Type:Article
Additional Information:Copyright © 1976 American Institute of Physics Received 16 October 1975 The authors wish to thank Dr. M. Kamoshida of Nippon Electric Co., Ltd., for his encouragement. They also thank W. P. Fleming of Hughes Research Labs. for the electron microprobe analysis. Work supported, in part, by the National Science Foudnation (T. Mukherjee) and the Air Force Cambridge Research Laboratories (D. E. Davies).
Record Number:CaltechAUTHORS:NAKapl76
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:NAKapl76
Alternative URL:http://dx.doi.org/10.1063/1.88734
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:5286
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:09 Oct 2006
Last Modified:26 Dec 2012 09:04

Repository Staff Only: item control page