Vahala, Kerry J. and Saunders, Winston A. and Tsai, Charles S. and Sercel, Peter C. and Kuech, Tom and Atwater, Harry A. and Flagan, Richard C. (1993) Lower-dimensional quantum structures by selective growth and gas-phase nucleation. Journal of Vacuum Science and Technology B, 11 (4). pp. 1660-1666. ISSN 1071-1023. http://resolver.caltech.edu/CaltechAUTHORS:VAHjvstb93
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There is increasing interest in the potential application of quantum dots and quantum wires to various solid state devices. In this article, the physics of lower-dimensional quantum structures will be reviewed with emphasis on applications. In addition, two fabrication approaches under investigation at Caltech will be discussed. The first is based on selective nucleation of III–V semiconductors on a patterned host substrate and the second is gas-phase nucleation of III–V clusters. Recent results on formation of nanocrystal GaAs and silicon clusters in the gas phase are presented.
|Additional Information:||© 1993 American Vacuum Society (Received 3 February 1993; accepted 1 April 1993)|
|Subject Keywords:||NUCLEATION; GALLIUM ARSENIDES; SILICON; SOLID CLUSTERS; QUANTUM DOTS; QUANTUM WIRES; USES; FABRICATION|
|Usage Policy:||No commercial reproduction, distribution, display or performance rights in this work are provided.|
|Deposited By:||Archive Administrator|
|Deposited On:||31 Oct 2006|
|Last Modified:||11 Jun 2015 20:21|
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